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Applied Materials AMAT P5000

XL Technology has extensive experience with most Applied Materials systems (Endura, Centura, P5000). Our technicians are highly trained and qualified to perform full refurbishment of the Precision 5000 CVD or Etch systems.

P5000 Processes
  • ASP
  • Sputter Etch
  • Oxide Etch
  • Poly Etch
  • Nitride Etch
  • Metal Etch
  • TEOS, Doped / Undoped
  • WCVD
  • WSiX
  • SACVD
P5000 Chambers
  • ASP
  • Mark II
  • MxP, MxP+
  • MxP+ Poly
  • WxP
  • DxZ
  • WxZ
  • Universal CVD
  • WCVD
  • Orienter Chamber
P5000 System Options
  • Mark II Mainframe
  • 8, 15, or 29 slot storage Elevator
  • Phase III Robot and Cassette Handler
  • Phase IV Hotbox
  • PLIS
  • Wafer Position System (W.P.S.)
  • Monochromator Endpoint
  • Through-the-Wall or Ballroom Style Installation


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