XL Technology DXZ VIEW LID 100176 XL Technology DXZ VIEW LID 100176
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XL Technology DXZ VIEW LID 100176

Manufacturer:
XL Technology
Part/Model:
100176
Product Description:
Maintenance fixture. Quartz disc installed in water cooled housing. Designed to sit on top of DXZ chamber lid. Must remove gas box and CVGFT to install or dedicate a DXZ lid. Used to check wafer hand offs, robot setup and other troubleshooting. Will withstand standard heater power for CVD process (~400C). Not for process. Gas and RF will not function with this lid in place. Comes in hard plastic storage case.
Total Quantity In Stock: OUT OF STOCK

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