Applied Materials Precision 5000
Silane-based
SiO2 & Si3N4 CVD
TEOS, BPTEOS
CVD
Tungsten CVD
MxP Oxide,
Poly & Metal Etch
MxP+ Oxide
Etch
Cupraselect
CVD Copper
MOCVD
TiN |
Applied
Materials Centura 5200
Silane-based
CVD (DxZ, DxL)
TEOS, BPTEOS
CVD
Thermal
Polysilicon CVD
MCVD (WxZ,
WxP)
HDP CVD
DPS Poly
Etch
Metal Etch |
Applied Materials Endura 5500
Standard
Aluminum & Titanium
Hot Aluminum
(HTHU)
Cobalt, NiCr,
SiCr
IMP Ti/TiN
SIP Ti/TiN
ALPS
Aluminum
TxZ |